Trichlorosilane

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Safety Data Sheet(s):
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Trichlorosilane- A colourless, volatile liquid with an irritating, choking odor

TECHNICAL INFORMATION
Chemical Symbol HSiCL3
Molecular Weight 135.45
Specific Volume 2.85 ft3/lb (0.18 m3/kg)
CAS Registry Number 10025-78-2
SHIPPING INFORMATION
DOT Proper Name Trichlorosilane
Hazard Class 4.3 (3) (8)
ID Number UN 1295
Labels Flammable Liquid, Dangerous When Wet, Corrosive
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes*ContentsCylinder Pressure (PSIG)CGA Valve Connection
       
*Nonstandard cylinder sizes available upon request

SPECIFICATIONS SUBJECT TO CHANGE
CALL TO CONFIRM

GradePurityImpuritySpecifications Equipment Recommended
3.5 (Semiconductor) 99.95% Boron
Carbon
Donor (As + P)
Iron
Other Chlorosilanes
Resistivity		 <0.1ppb/a
<5ppb/a
<0.8ppb/a
<50ppb/a
<500ppm/w
≥300Ohm-cm		 Call for Recommendation
3.0 (Semiconductor) 99.9% Boron
Carbon
Donor (As + P)
Other Chlorosilanes
Resistivity		 <0.1ppb/a
<50ppm/a
<1ppb/a
<1,000ppm/w
>300Ohm-cm		 Call for Recommendation

This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.