Middlesex Gases

Specialty Gases

Silane Gas Supplier for New England

Silane Gas

A colorless, flammable gas with a sharp, repulsive smell, somewhat similar to that of acetic acid

Learn more about Silane gas, a colorless, flammable gas with a sharp, repulsive smell, somewhat similar to that of acetic acid, supplied by Middlesex Gases to commercial customers in Massachusetts, New Hampshire, Rhode Island and Connecticut and throughout New England.

TECHNICAL INFORMATION
Chemical Symbol SiH4
Molecular Weight 32.12
Specific Volume  
CAS Registry Number 7803-62-5
SHIPPING INFORMATION
DOT Proper Name Silane
Hazard Class 2.1
ID Number UN2203
Labels Highly Flammable Gas
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes* Contents Cylinder Pressure (PSIG) CGA Valve Connection
150AL 5KG 976 350/632
200 5KG 1040 350/632
*Nonstandard cylinder sizes available upon request

SPECIFICATIONS SUBJECT TO CHANGE

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Additional Information
GradePurityImpuritySpecifications Equipment Recommended





4.7 Semiconductor Process Grade





99.997%

AR
CO2
CO
Total Chlorosilanes
He
H2
CH4
N2
O2
H2O
Resistivity

<1ppm
<0.5ppm
<0.5ppm
<0.5ppm
<5ppm
<100ppm
<0.5ppm
<5ppm
<0.1ppm
<2ppm
>/=7,500 Ohm-cm






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4.0 Semicondutor Process Gas





99.99%

Ar
CO2
CO
Total Chlorosilanes
He
H2
CH4
N2
O2
H2O
Resistivity

<15ppm
<1ppm
<1ppm
<1ppm
<30ppm
<200ppm
<1ppm
<20ppm
<1ppm
<23ppm
>/=5,000 Ohm-cm






Call for Recommendation
This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.

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