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Specialty Gases

Dichlorosilane Gas

Dichlorosilane Gas

An intermediate between silane and silicon tetrachloride

Learn more about Dichlorosilane gas, an intermediate between silane and silicon tetrachloride, supplied by Middlesex Gases to commercial customers in Massachusetts, New Hampshire, Rhode Island and Connecticut and throughout New England.

TECHNICAL INFORMATION
Chemical SymbolSiH2CI2
Molecular Weight101.07
Specific Volume1.013 bar and 25 °C (77
°F)) : 0.239 m3/kg
CAS Registry Number4109-96-0
SHIPPING INFORMATION
DOT Proper NameDichlorosilane
Hazard Class2.3
ID NumberUN2189
LabelsFlammable Gas, Toxic Gas
CYLINDER SIZES AVAILABLE
Std. Cylinder Sizes*ContentsCylinder Pressure (PSIG)CGA Valve Connection
AL15095lb9670/678
*Nonstandard cylinder sizes available upon request

SPECIFICATIONS SUBJECT TO CHANGE

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Additional Information
GradePurityImpuritySpecificationsEquipment Recommended
2.7
(Semiconductor
Process Gas)		99.7%

Inert Gas
Monochlorosilane
Trichlorosilane
Silicon Tetrachloride
Carbon
Aluminum
Arsenic
Boron
Iron
Phosphorous
Resistivity

<1000ppm
<800ppb/w
<2000ppb/w
<300ppb/w
<0.05ppb/w
<0.04ppb/w
<0.03ppb/w
<0.02ppb/w
<3ppb/w
<0.05ppb/w
>400 Ohm-cm





Call for Recommendation
2.0
(Semiconductor
Process Gas)		99.0%

Inert Gas
Carbon
Aluminum
Arsenic
Boron
Iron
Phosphorous
Monochlorosilane
Silicon Tetrachloride
Trichlorosilane
Resistivity

<10,000ppm
<1ppm/w
<1ppb/w
<0.2ppb/w
<0.01ppb/w
<50ppb/w
<1000ppm/w
<500ppm/w
<8000ppm/w
<0.05ppb/w
>400 Ohm-cm





Call for Recommendation
This information in no way replaces the Safety Data Sheets (SDS) for use and safety standards. Please refer to the SDS for details.
More Specialty Gases
A photo of the element Dichlorosilane
Download PDF
Dichlorosilane SDS

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