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Learn more about Dichlorosilane gas, an intermediate between silane and silicon tetrachloride, supplied by Middlesex Gases to commercial customers in Massachusetts, New Hampshire, Rhode Island and Connecticut and throughout New England.
Chemical Symbol | SiH2CI2 |
Molecular Weight | 101.07 |
Specific Volume | 1.013 bar and 25 °C (77 °F)) : 0.239 m3/kg |
CAS Registry Number | 4109-96-0 |
DOT Proper Name | Dichlorosilane |
Hazard Class | 2.3 |
ID Number | UN2189 |
Labels | Flammable Gas, Toxic Gas |
Std. Cylinder Sizes* | Contents | Cylinder Pressure (PSIG) | CGA Valve Connection |
---|---|---|---|
AL150 | 95lb | 9 | 670/678 |
SPECIFICATIONS SUBJECT TO CHANGE
Grade | Purity | Impurity | Specifications | Equipment Recommended |
---|---|---|---|---|
2.7 (Semiconductor Process Gas) |
99.7% | Inert Gas |
<1000ppm |
Call for Recommendation |
2.0 (Semiconductor Process Gas) |
99.0% | Inert Gas |
<10,000ppm |
Call for Recommendation |